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・ Surface micromachining
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・ Surface Mining Control and Reclamation Act of 1977
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Surface photovoltage
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Surface photovoltage : ウィキペディア英語版
Surface photovoltage
Surface photovoltage (SPV) measurements are a widely used method to determine the minority carrier diffusion length of semiconductors. Since the transport of minority carriers determines the behavior of the p-n junctions that are ubiquitous in semiconductor devices, surface photovoltage data can be very helpful in understanding their performance. As a contactless method, SPV is a popular technique for characterizing poorly understood compound semiconductors where the fabrication of ohmic contacts or special device structures may be difficult.
== Theory==

As the name suggests, SPV measurements involve monitoring the potential of a semiconductor surface while generating electron-hole pairs with a light source. The surfaces of semiconductors are often depletion regions (or space charge regions) where a built-in electric field due to defects has swept out mobile charge carriers. A reduced carrier density means that the electronic energy band of the majority carriers is bent away from the Fermi level. This band-bending gives rise to a surface potential. When a light source creates electron-hole pairs deep within the semiconductor, they must diffuse through the bulk before reaching the surface depletion region. The photogenerated minority carriers have a shorter diffusion length than the much more numerous majority carriers, with which they can radiatively recombine. The change in surface potential upon illumination is therefore a measure of the ability of minority carriers to reach the surface, namely the minority carrier diffusion length. As always in diffusive processes, the diffusion length L is approximately related to the lifetime \tau_\mathrm by the expression L = \sqrt = \sqrt
where \tau_\mathrm is the effective carrier lifetime, \tau_\mathrm is the bulk carrier lifetime, s is the surface recombination velocity and d is the film or wafer thickness. Even for well characterized materials, uncertainty about the value of the surface recombination velocity reduces the accuracy with which the diffusion length can be determined for thinner films.

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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